Recent advances in the small-scale system development and high density integration of complex systems have not only been driven by the steady push toward miniaturization and demanding higher performance at lower cost, but also has been impelled by the large variety of applications that are enormously affected by the miniature systems. These applications are spread in a rather broad range including health care, automotive, industrial and process control, instrumentation, military and consumer market. Advanced CMOS and Micro Electro Mechanical System (MEMS) fabrication processes have been the key enabling technologies of the microsystems. Deep sub-micron CMOS technology has made integration of complex electrical functions for electrical system-on-a-chip possible. Nevertheless micromachining and MEMS processes have provided the means to merge 3-D microstructures such as microsensors and microactuators with VLSI circuitry, and realize general microsystems consisting of electrical and non-electrical functional blocks. These general microsystems can directly interact with the real world, and thus they are expected to have the most widespread impact on the application domains. The impact of MEMS and integrated Microsystems is not just limited to reducing overall size, cost, weight, and power dissipation. They open up new market opportunities, or enhance the overall accuracy and performance of the systems by making formation of large arrays of distributed microsystems and transducers feasible.
The objective of the proposed short course is to give a fundamental introduction of various aspects of the MEMS technology including microfabrication processes, microsensors, microactuators, and interface electronics, and micro electro mechanical system modeling. Moreover the current challenges and research directions in addition to several commercialized MEMS devices will be presented. Two sessions each about two hours will cover the following topics:
- Introduction and overview of applications
- Fundamental principles and design of micro electro mechanical (MEM) devices
- MEMS fabrication technologies
- Micro electro mechanical system modeling issues and solutions
- Readout and control integrated circuits for sensors and actuators
- Microsystem integration
About the Presenters:
Navid Yazdi (Ph.D. Electrical Engineering, University of Michigan, Ann Arbor 1999). Dr. Yazdi is an Assistant Professor in the Department of Electrical Engineering at Arizona State University, Tempe, currently on-leave and managing the electronics group at Corning IntelliSense Corporation, where he is working on transparent MEMS-based optical cross-connect switches and wavelength management products. Dr. Yazdi has authored several publications in the past 7 years on MEMS devices and their fabrication technologies, VLSI circuits, and wireless microsystems.
Andrew Mason (Ph.D. Electrical Engineering, University of Michigan, Ann Arbor 2000). Dr. Mason is an Assistant Professor at Michigan State University in the Electrical and Computer Engineering Department where his research activities focus on the design of highly-programmable mixed-signal sensor interface circuitry and low-power multi-sensor microsystems.